Potential phase control of chromium oxide thin films prepared by laser-initiated organometallic chemical vapor deposition

摘要

We have used laser-initiated chemical vapor deposition to grow the chromium oxide thin films through the oxidation of Cr(CO)6 in an oxygen environment. While both Cr2O3 and CrO2 are present in the film, the relative weight of each phase depends on the oxygen partial pressure. The Curie temperature of the film increases and approaches the bulk TC of CrO2 (397 K) as the partial oxygen pressure is increased. © 2001 American Institute of Physics. [DOI: 10.1063/1.1343846]